Nature Electronics, Published online: 21 July 2026; doi:10.1038/s41928-026-01673-6 A ferroelectric capacitor with a 3-nm-thick hafnium zirconium oxide layer
A ferroelectric capacitor with a 3-nm-thick hafnium zirconium oxide layer
Yan Huang
Nature Electronics, Published online: 21 July 2026; doi:10.1038/s41928-026-01673-6 A ferroelectric capacitor with a 3-nm-thick hafnium zirconium oxide layer