As semiconductor gas box designs incorporate more process lines and control points, the number of pilot valves required to manage critical gases increases. Typical valve terminals with limited capacity force OEMs to use multiple units, increasing panel space, wiring complexity, build time, and system cost. Festo offers the VTOC valve terminal designed for high-density semiconductor applications.… The post Festo VTOC Valve Terminal Enhances Valve Control in Semiconductor Fabrication appeared firs

Festo VTOC Valve Terminal Enhances Valve Control in Semiconductor Fabrication
Shannon Davis

