Nature Communications, Published online: 07 July 2026; doi:10.1038/s41467-026-75196-1 The large-scale integration of high-κ dielectric materials with 2D semiconductors is important for the miniaturization of 2D electronics. Here, the authors report the growth of millimeter-scale high-κ MoO3 crystalline films and their application as gate dielectric for 2D transistors and complementary logic devices.