Broadband extreme ultraviolet zeroth order scatterometry for nanostructure metrology
Peter M. Kraus
Nature Communications, Published online: 19 May 2026; doi:10.1038/s41467-026-73052-w Scatterometry techniques at extreme ultraviolet wavelength are a promising way to achieve spatially resolved material characterisation. Here, the authors present a scatterometry method based on high-harmonic-generation together with model based reconstruction providing nanometer-level accuracy.