Dynamic-SIMS (D-SIMS) - Surface Science Western

Secondary ion mass spectrometry (SIMS) provides elemental and isotopic analysis of very small volumes situated on the surface of solid samples. Operated in dynamic SIMS mode, an energetic primary ion beam sputters ions and neutrals from the sample surface. Some of the sputtered material is ejected either as positive or negative secondary ions. Therefore, each point of the surface becomes a source of secondary ions that are characteristic of the elements or isotopes found in the near surface...