A chip-scale image sensor integrated with a microelectromechanical system actuator
Xiaoguang Zhao
Nature Electronics, Published online: 07 April 2026; doi:10.1038/s41928-026-01600-9 A chip-scale image sensor that uses a microelectromechanical system actuator to modulate the sensor’s position can enhance the spatial bandwidth product by up to 33.7-fold compared with operation without actuation.