Fabrication of nano-scale blue GaN-based nanopillar array LEDs for near-eye displays

Abstract Nano-scale light-emitting diodes (LEDs) are crucial for realizing ultra-high-resolution displays and have attracted significant attention. This paper reports a blue-emitting nanopillar LED display with a resolution up to 500×150 and a pixel density of 6336 PPI. The display area is 2×0.6 mm2, with individual pixels with a diameter of approximately 800 nm. Key steps in the device fabrication include precise etching to define nano-scale pixels, TMAH treatment to repair etching-induced dama