Malus’s law-enhanced Michelson interferometer with PSO-based calibration and data-driven error compensation for medical micro-displacement measurement
Shilian Dong
BackgroundHigh-precision micro-displacement measurement is crucial for applications ranging from semiconductor manufacturing to biomedical diagnostics. However, conventional Michelson interferometry is fundamentally limited by the light source’s coherence length and the inefficiency of manual fringe counting.MethodsThis study introduces a modified Michelson interferometer that operates on Malus’s law. The design converts the linear micro-displacement of a movable mirror into the rotation angle o