OOptics Express11d ago

Simulation assessment of 9.6 μm CO₂ laser drive for Sn-LPP EUV generation

Ziyi Wu·Bo Li·Tian Yu·Mengqi Zhang·Shuaihua Ma·Youyou Hu·Jiang Zhao·Changyu He·Jiajun Wang

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Laser Design and ApplicationsElectrical and Electronic Engineering