MMaterials Science in Semiconductor Processing10d agoPlasma etching of gently sloped mesa with controllable sidewall curvature for enhancing junction termination breakdown voltage of GCT cellsNingfei Sun·Ruifeng Yue·Xiaoguang Wei·Ling Li (38566)·Caiping Wan·Yaohua Wang·Shiyu Ji·焦倩倩·Mingchao Gao·Liang Wang·Rui LiuRead at Materials Science in Semiconductor ProcessingTagsPlasma Diagnostics and ApplicationsElectrical and Electronic Engineering
