MMicrosystems & Nanoengineering4d agoManufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technologyFeng Zhu·Xiang Xi·Yan Shi·Mengxue Li·Jiangkun Sun·Kun Lu·Yongmeng Zhang·Dingbang Xiao·Xuezhong WuRead at Microsystems & NanoengineeringTagsAdvanced MEMS and NEMS TechnologiesElectrical and Electronic Engineering
