MMicrosystems & Nanoengineering4d agoA curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stabilityYancheng Lian·Yuan Wang·Fangzhou Chen·Zhuoyue Zheng·Jinuo Zhou·Junchen Liu·Fengzhe Xu·Jinbo Yang·Jianlin Chen·Chen Wang·Michael Kraft·Ka-Meng Lei·R.P. Martins·Pui-In Mak·Yueyang LiRead at Microsystems & NanoengineeringTagsAdvanced MEMS and NEMS TechnologiesElectrical and Electronic Engineering
