MMicrosystems & Nanoengineering5d ago

Deep learning-driven performance prediction and design of high-DoF MEMS resonators

Zeyu Jia·Qianbo Lu·Maoyun Li·Wenhui Yan·Xiaoxu Wang·Lei Miao·Jiaxin Sun·Shuang Wu·Chaoyue Shi·Dehua Tan·Wukai Li·Yuhao Wang·Pengfei Li·Chaohui Wu

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Mechanical and Optical ResonatorsAtomic and Molecular Physics, and Optics