MMicrosystems & Nanoengineering6d agoLeveraging the microscale effect to enhance the overload capacity of a piezoresistive differential pressure sensorMeng Li·Liqun Du·Huifeng Qiu·Xiaochen Yang·Bingze Shang·Bingnan LiuRead at Microsystems & NanoengineeringTagsAdvanced MEMS and NEMS TechnologiesElectrical and Electronic Engineering
