MMicrosystems & Nanoengineering6d agoOptimizing fatigue resistance and lifetime of MEMS scanning mirrors with a novel coupled parameter distribution structural frameworkSongtao Liu·Zheng You·Gaofei Zhang·Zhuohang ZhangRead at Microsystems & NanoengineeringTagsAdaptive optics and wavefront sensingAtomic and Molecular Physics, and Optics
