AApplied Surface Science Advances5/16/2026Femtosecond laser ablation (fs-LA) and sputter XPS depth profiling of a tantalum nitride thin film – a comparative studyC.W. Chandler·M.A. Baker·D.S. Devadasan·H. Oppong-Mensah·G. Greczynski·TS NunneyRead at Applied Surface Science AdvancesTagsIon-surface interactions and analysisComputational Mechanics