Study on Silicon dioxide Chemical mechanical planarization using iron-cobalt double-doped Cerium dioxide abrasives

Abstract In this paper, iron-cobalt double-doped CeO2 (CeO2-FeCo) abrasives was synthesized by hydrothermal method with a particle size of about 50 nm. It was found that iron-cobalt double-doping could effectively regulate the lattice structure and Ce 3+ /Ce 4+ of CeO2 ratio by Raman, UV-Vis, XPS experiments. CMP experiments show that CeO2-FeCo has the optimal polishing effect, with a removal rate of 365.1 nm/min and a low surface roughness as low as 0.148 nm, which is mainly attributed to the i