MMaterials Science in Semiconductor Processing4/17/2026Low-resistance ohmic contacts on AlGaN/GaN HEMTs via MBE regrown n+-GaNLi Liu·Jun Liu·Hanxiang Jia·Shaokun Xing·Hao Xu·Yiyuan Sun·Lei Pan·Bo Zhao·Baohua Tan·Chang Wu·Shuangzan Lu·Jiajie PanRead at Materials Science in Semiconductor ProcessingTagsGaN-based semiconductor devices and materialsCondensed Matter Physics
