JJournal of Manufacturing Systems3/29/2026An approximate analytical method for the performance evaluation of semiconductor front-end fabrication with model-based inspection and rework policies in process controlMatteo Carabelli·Tullio Tolio·Maria Chiara Magnanini·Dragan DjurdjanovićRead at Journal of Manufacturing SystemsTagsIndustrial Vision Systems and Defect DetectionIndustrial and Manufacturing EngineeringReworkSemiconductor device fabricationProcess (computing)FabricationProcess controlControl (management)Semiconductor industryWork (physics)
