Abstract The growing demand for rapid market introduction of AI, particularly for Edge AI applications, necessitates the quick development of specialized ASIC-based LSI hardware. To address this need, we have developed an aluminum (Al) multi-layer interconnect technology within a minimal fab environment. The process reliably produces 2 μm vias and interconnect features and yields contact resistances acceptable for targeted high-density gate-array applications. This work demonstrates the potentia
Agile prototyping of AI hardware LSIs using multi-layer aluminum interconnects in a minimal fab environment
Hirofumi Sumi·Makoto Ikeda·Naonobu Shimamoto·Atsutake Kosuge·Yukinori Ochiai·Tohru Mogami·Yoshio Mita·Hideharu Amano
