Design and Optimization of MEMS Vacuum Gauge Circuits for Enhanced Leakage Suppression and Accurate Capacitance Conversion

Micro-electro-mechanical systems (MEMS) capacitance diaphragm gauges (CDGs) integrate complementary metal-oxide-semiconductor (CMOS) technology, providing low cost, low power consumption, and high integration. However, their accuracy is limited by leakage currents that reduce capacitance-to-digital conversion precision. To overcome these limitations, this study presents a high-precision capacitance-to-digital conversion circuit. The circuit adopts a continuous-time switched-capacitor architectur