MMaterials Science in Semiconductor Processing17d agoEffect of wafer inclination on the surface morphology of SiGe grown on Si(110) wafersYuta Fujimoto·Keisuke Arimoto·Junji Yamanaka·Monami Yokota·Akihiro Suzuki·Kazuhito Matsukawa·Koji Matsumoto·Hiroaki Yamamoto·Kosuke O. Hara·Naoyuki WadaRead at Materials Science in Semiconductor ProcessingTagsSilicon and Solar Cell TechnologiesElectrical and Electronic Engineering
