OOptics & Laser Technology19d agoStudy on The synergistic effect and material removal mechanism in Laser-Ultrasonic vibration composite scratching of single crystal siliconDaohui Xiang·Jinglin Tong·Chaosheng Song·Yanqin Li·Shuaikun Yang·Peicheng Peng·Jinglong Sang·Guofu Gao·崔红跃Read at Optics & Laser TechnologyTagsSurface Treatment and Residual StressMechanical Engineering
