MMaterials Science in Semiconductor Processing4/24/2026Numerical modeling and experimental study of reduced-pressure SiGe epitaxial growth based on chemical reaction kineticsZ Zhang·Yancheng Wang·Lingfeng Zhu·Wenhao Zhang·Deqing MeiRead at Materials Science in Semiconductor ProcessingTagsSemiconductor Quantum Structures and DevicesAtomic and Molecular Physics, and Optics
