MMaterials Science in Semiconductor Processing4/23/2026Preparation and properties of conductive fixed abrasive polishing discs for electrochemical mechanical polishing of SiC substratesQiufa Luo·Hui Huang·Yikun Hu·Yiyang Zhu·Jing Lu·Congming KeRead at Materials Science in Semiconductor ProcessingTagsAdvanced Surface Polishing TechniquesBiomedical Engineering
