AApplied Materials Today4/22/2026Investigation of enhanced capacitive performance and oxidation behavior of TiMoN film electrodes for on-chip micro-supercapacitorMengxiao Wang·Nana Sun·Jin Xu·Yunpeng Su·Jiaye Gu·Xianfeng Yu·Yaolin Lou·Dayu ZhouRead at Applied Materials TodayTagsSupercapacitor Materials and FabricationElectronic, Optical and Magnetic Materials
