JJournal of Manufacturing Processes4/15/2026Polishing-velocity effects on material removal and subsurface damage in SiO₂–Si nano-polishing: A molecular dynamics studyWenlu Wang·Pengyue Zhao·Ning Zhang·Tongzhao Wang·Ying Cao·Meng LiRead at Journal of Manufacturing ProcessesTagsAdvanced Surface Polishing TechniquesBiomedical Engineering
