MMaterials Science in Semiconductor Processing4/6/2026From deposition kinetics to electrochromics: Phase-field simulation unveils the superiority of amorphous MoO3-x microstructuresYu Lin·Shaozhi Deng·Shuai Tang·Fei Liu·Jun Chen·Yan Shen·Ao Cheng·Runze Zhan·Huanjun Chen·Zhe Liu·Juncong She·Cheng WangRead at Materials Science in Semiconductor ProcessingTagsTransition Metal Oxide NanomaterialsPolymers and Plastics