Covalent Grafting of Low- k Magnolol Films on Si(111) Using Aryldiazonium Salts

The continuous miniaturization and high integration of integrated circuits (ICs) make low-dielectric constant (low-<i>k</i>) materials a critical bottleneck for further performance enhancement. This study explores magnolol, a biobased compound extracted from the natural plant Magnolia officinalis, as a novel dielectric material. Compared to traditional fossil-based dielectric materials, this new material aligns with sustainable development goals. The successful co-grafting of 4-nitrobenzenediazo