Deep learning modeling of oxygen redistribution and thermal transport in silicon on insulator and buried oxide layers

Silicon on insulator technology requires precise control of buried oxide layers and the associated heat transfer across interfaces. Current approaches struggle to predict oxygen distribution and layer thickness after implantation and annealing, and they face challenges in computing interfacial thermal resistance under complex conditions. Here we show a computational framework that integrates machine-learned interatomic potentials with molecular dynamics to resolve oxygen diffusion kinetics and t